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List of Products

Amaya produce systems which meet your needs. Amaya make your system per your inquiry.

Feature of Products

  • Applicable to variety industries from semiconductor, solar cells and etc
  • Small to large volume production
  • Variety types of films like SiO2, BPSG, BSG, PSG, AlOx
  • Heavy metal contamination free by using silicon carbide trays
  • Deposite films at wide range of temperature from 200°C to 500°C

Semiconductor Production System

A200V
Single Wafer APCVD

AMAX800V
Continuous High Throughput APCVD for 8 inch wafers

AMAX1200
Continuous APCVD for 12 inch wafers

A6300S
Continuous High Throughput APCVD for 6 inch or below

Customized APCVD

D501
Batch Type APCVD

Solar Cell Production System

AMAX1000S
Solar Cell Production Continuous High Volume APCVD for 125mm x 125mm cell or 156mm x 156mm cell

Atmospheric Pressure Low Temperature SiH4-O3 CVD System

In-line APCVD for rigid/flexible electronics such as FPD.

Order Made APCVD
Used APCVD